TL;DR: In this article, a concise overview of sputter deposition technology, a key technology for materials research in the next ade, is presented, with a focus on high temperature superconductors III. Sputtering technology for nanomaterials and thin film ,  · This book presents a concise, comprehensive overview of sputter deposition technology, a key technology for materials research in the next ade The sputtering technology used today in industry for depositing ITO coatings is quasi-reactive DC magnetron sputtering starting from ceramic ITO planar targets (almost Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers This book presents a concise, comprehensive overview of sputter deposition technology, a key technology for materials research in the next ade. II. Theory and practice: sputtering deposition of functional thin filmspt. Cathode sputtering is Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and ABpt. This book presents a concise, comprehensive overview of sputter deposition technology, a key technology for materials research in the next ade. I. Fundamentals of sputteringpt. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings Handbook of sputter deposition technology: principles, technology, and applications.